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Wafer Analysis Using Multiple Spectroscopies on One Microscope
Microspectroscopy is the practice of performing various spectroscopies with sampling at the micro scale and below. Due to its ubiquity and sturdy optical design, the standard microscope from any of the major microscope manufacturers presents a natural platform for such studies and many researchers have long customized this platform for spectroscopy. Though very appealing to multiplex the native imaging functions of the microscope with spectroscopy, the effort can be very challenging because most microscopes are inherently imaging devices in the visible range of the optical spectrum and the optical design considerations that go into this function are much different from those of a broad spectrum spectroscopy instrument.

In this webinar, we present a novel concept that adds various spectroscopies on any optical microscope – the so-called Standard Microscope Spectroscopy Systems or SMS. Because our design decouples the key optics required from spectroscopy from that of imaging, it enables functional optimization of spectroscopic performance without compromises to the native imaging functions of the microscope. Furthermore, by being a flexible and modular design, SMS systems enable multiplexing of different complimentary spectroscopies on one platform. This is not only affordable but also facilitates acquisition of different but complimentary spectra from the same micro-point on the sample. This functionality can be readily added to a user’s existing microscope.

Our large SMS wafer mapper enables combination of spectroscopies such as Raman, Photoluminescence, Time-resolved Photoluminescence and Reflectance on one instrument capable of mapping up to 300mm wafers.

May 12, 2021 02:00 PM in Eastern Time (US and Canada)

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Francis Ndi
Global Product Line Manager, OSD @HORIBA Scientific
Francis is the Global Product Line Manager for the custom spectroscopy solutions division (OSD) at HORIBA Scientific. The custom spectroscopy solutions unit specializes in offering modular and flexible spectroscopy solutions for needs not readily met with standard systems. These solutions range from components such as spectrometers and CCD detectors to full turnkey systems. Francis joined HORIBA in the role of Applications Scientist. He has also held roles in the export business of the company.
Mark Andrews (Moderator)
Technical Editor @Angel Business Communications
Mark Andrews is technical editor for Angel Business Communications. Prior to joining Angel Business Communications in 2014 he was strategic marketing manager for TriQuint (now Qorvo). Marks experience focuses on RF and photonic solutions for infrastructure, mobile device, aerospace, aviation and defence industries.