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OCCA Weekly Webinar - Spectroscopic Ellipsometry for Thin Film Characterisation

Spectroscopic ellipsometry is used to measure nanometer-scale layers used in microelectronics, data storage, flat panel displays and many other thin-film applications. Ellipsometers inherently detect the change in polarisation that occurs as light reflects or transmits from a material structure. The polarisation change is represented as an amplitude ratio, Ψ, and the phase difference, Δ. The measured response depends on optical properties and thickness of individual materials. Thus, ellipsometry is primarily used to determine film thickness and optical constants. However, it is also applied to characterise composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical response. This webinar will describe the fundamental ellipsometry measurement and introduce data analysis techniques. It will also include an overview of primary applications and associated data analysis techniques.

Jun 22, 2022 02:30 PM in London